Education

Plasma Processing

Module Specification, Dublin City Unisversity

Module Title:	Plasma Processing
Module Code:	PVS 206
School:	TRIP
Module Coordinator:	-
Office Number:	-
Level:	1
Credit Rating:	5
Pre-requisite(s):	Year 1
Co-requisite(s):	None

 

Module aims:

• To provide an appreciation of the fundamentals concepts of plasma processing
• To illustrate the relevance of these concepts in modern application of plasma processing

 

Learning Outcomes:

• Understanding of the basic concepts of plasma processing
• Familiarity with plasma surface interactions and plasma chemistry
• Knowledge of sputtering, chemical and physical etching
• Understanding of complex structures

 

Indicative Time Allowances:

Contact Lectures:	9 hours
Web Based Lectures:	15 hours
Online Testing:	10 hours
Assignments:	15 hours
Independent Learning Time:	30 hours
Total:	79 hours
Note: Assume that a module load represents approximately 75 hours' work which includes all teaching, in-course assignments, laboratory work or other specialised training and an estimated private learning time associated with the module.

 

Indicative Syllabus:

• Plasma Surface Interactions & Plasma Chemistry
• Plasma Processing
• Sputtering, Etching & Deposition
• Specific Processing
• Chemical Etching
• Physical Etching
• Examples of industrial applications - plasma treatment of polymers
  • Semiconductor processing
  • TF deposition

 

Assessment:
Only include components relevant to this module

In-course Test:	25%
Online Assessment :	25%
End of Module Test:	50%

 

Indicative Reading List:

Essential:	-
Supplementary:	-

 

Programme or List of Programmes:

-

 

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